Fukuda USA ● Fukuda Mexico


A Division of Nagano Keiki Group



Test piece size(mm) from 1.0×0.8 to 3.2×2.5



Leak test systems ensure airtightness in compact electronic components like crystal devices, ceramic oscillators, optical devices, power semiconductors, CAN devices, laser diodes, MEMS, SAW filters, relays, and capacitors. They perform two tests: gross leak and fine leak. Systems include fully-automatic, custom, and benchtop models.



Hermetically Sealed Electronic Components Leak Test System



Bombing /Gross /Fine Leak Test System



MSX-0101 series



The MSX-0101 series leak test system is designed for small-volume tests, such as those for devices under development and sample testing. It can control bombing conditions (helium charge), gross leak tests, and fine leak tests.

  • Test piece size(mm): 1.2×1.0～2.5×2.0、Φ12～3.2×2.5 *The applicable testing size varies depending on the gross leak sensor model.
  • Judgment Level(Pa･m³/s): Gross Leak：2×10⁻⁷～Large Leak（Equivalent standard leak） Fine Leak：1×10⁻⁹～（He）



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MSX-6110 series



The MS-6086 series fully-automatic system conducts leak testing while controlling the bombing (Helium charge), gross leak test, and fine leak test conditions..

  • Test piece size(mm):1.2×1.0～2.0×1.6
  • Judgment Level(Pa･m³/s): Gross Leak: 2×10⁻⁷〜Large Leak（Equivalent standard leak） Fine Leak：1×10⁻⁹〜　（He）

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MSX-6200 series



The MS-6200 series fully-automatic system conducts leak testing while controlling the bombing (Helium charge), gross leak test, and fine leak test conditions.

  • Test piece size(mm):1.2×1.0～2.0×1.6
  • Judgment Level(Pa･m³/s): Gross Leak: 2×10⁻⁷〜Large Leak（Equivalent standard leak） Fine Leak：1×10⁻⁹〜　（He）
  • 8 ch

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MSX-7000 series



The MSX-7000 series system can control bombing conditions (Helium charge), gross leak tests, and fine leak tests. Industry's first model which is compatible with 1.0 x 0.8 size. Conveyance accuracy is improved through position correction which uses image processing.

  • Target Test Size: Compatible with 2 types 1.0x0.8mm, 1.2x1.0mm Thickness: 0.3～0.5mm
  • Judgement Level（Pa･m³/s): Gross Leak: 8.5x10⁻⁸～Large leak（equivalent standard leak） Fine Leak: 1x10⁻⁹～（He）)..

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Gross Leak Test System



MS-512 / 522 series



The MSX-0101 air leak testing system is designed for use in small volume tests such as of devices under development, in preliminary experiments before introduction to mass production lines, and in sampling tests. Target test size：2.5×2.0mm ～up to φ18.5 ×length 30mm

  • Under test pressure of 200kPa FL-510: 1×10⁻⁴~Large leak Large test pieces(up to φ18.5×length 30mm) *MS-511 only FL-513: 1×10⁻⁵~Large leak、5.0×3.2mm FL-515: 5×10⁻⁶~Large leak、 2.5×2.0、3.2×2.5mm



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MS-6086 series



The MS-6086 series is a dedicated device for gross leak test.

  • Test piece size(mm):1.6x1.2～2.5x2.0　*1.6ｘ1.2 (custom-made)
  • Gross leak: 2 x 10⁻⁷〜Large Leak (Equivalent standard leak)
  • 8ch
  • Process capacity　1.0s/part

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MSZ-6200 series



The MS-6200 series is a dedicated device for gross leak testing, capable of measuring up to 7,200 units per hour.

  • Test piece size(mm):1.2×1.6～3.2×2.5
  • Judgment Level(Pa･m³/s): Gross Leak: 2×10⁻⁷〜Large Leak (Equivalent standard leak)
  • 12ch
  • Process Capacity:0.5s/part

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MSA-0101 series


This airtight testing system is designed for small-volume tests, such as those involving devices under development, preliminary experiments before mass production, and sampling tests. Target test piece sizes (mm): W80 × D70 × H50 or smaller, or Φ40 × H60 or smaller.

  • Hermeticity inspection equipment for small electronic components.
  • Measurement method is Pressure decay method (Sealed chamber method).
  • Min. detectable leak rate: 1×10⁻⁶Pa･m³/s. (*Depends on conditions, etc.) .

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Ultra Fine Leak Test System



For small electronic and MEMS components, like angular velocity and infrared image sensors, need long-lasting sealing to stay airtight. FUKUDA's 'Capsule-Accumulation Method' is a highly sensitive helium leak detection technology for ultra-fine leak testing. The MUH-0100 series uses this method for precise airtightness testing.





MUH-0100 series



The MUH-0100 series system performs airtight testing using fine leak testing (Vacuum Chamber Method) and ultra-fine leak testing (Capsule Accumulation Method). It can measure leaks as small as 4×10⁻¹⁵ Pa·m³/s (He) using the Capsule Accumulation Method.


Test Parts Size: ～Φ44×D31 mm（30square）


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FUkuda usa
fukuda Mexico



USA 1-270 745 7300
2721 Pioneer Drive, Bowling Green, KY 42101 USA
Mexico (52)1-449-996-0984
Av Aguascalientes Nte 622, Pulgas Pandas, 20138 Aguascalientes, Ags. Mexico


info@fukuda-us.com